Effective quality factor tuning mechanisms in micromechanical resonators
نویسندگان
چکیده
منابع مشابه
Focused ion beam tuning of in-plane vibrating micromechanical resonators
Vibrating resonators are important components of micromechanical systems, with applications in sensors and actuators. However, defects and stresses can cause resonance shifts, and it is important to develop methods of tuning. Passive methods are based on dimensional trimming and active methods on electrically-induced stress. For example, reactive ion etching (RIE) has been used to apply global ...
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ژورنال
عنوان ژورنال: Applied Physics Reviews
سال: 2018
ISSN: 1931-9401
DOI: 10.1063/1.5027850